Hagiwara, Takuya: search on Z-Library

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1

The organic mercury compounds, methylmercury and ethylmercury, inhibited ciliary movement of ventricular ependymal cells in the mouse brain around the concentrations reported for human poisoning

Yoshida, Shigeru, Matsumoto, Shinsaku, Kanchika, Takuya, Hagiwara, Teruki, Minami, Takeshi

Journal:

NeuroToxicology

Year:

2016

Language:

english

File:

PDF, 704 KB

english, 2016

2

Short-term Clinical Results of Manipulation Under Ultrasound-Guided Brachial Plexus Block in Patients with Idiopathic Frozen Shoulder and Diabetic Secondary Frozen Shoulder

Ando, Akira, Hamada, Junichiro, Hagiwara, Yoshihiro, Sekiguchi, Takuya, Koide, Masashi, Itoi, Eiji

Journal:

The Open Orthopaedics Journal

Year:

2018

Language:

english

File:

PDF, 1.09 MB

english, 2018

3

Analysis of vibration waveforms of electromechanical response to determine piezoelectric and electrostrictive coefficients

Izumi, Tatsuya, Hagiwara, Manabu, Hoshina, Takuya, Takeda, Hiroaki, Tsurumi, Takaaki

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2012

Language:

english

File:

PDF, 586 KB

english, 2012

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - Improvements of adhesion and hydrophobicity of wafer bevel in water immersion lithography

Henderson, Clifford L., Ishibash, Takeo, Terai, Mamoru, Hagiwara, Takuya, Kumada, Teruhiko, Hanawa, Tetsuro, Takebe, Yoko, Yokokoji, Osamu, Fujiwara, Tomoharu, Akiyama, Hiroshi

Year:

2008

Language:

english

File:

PDF, 324 KB

english, 2008

5

Effects of Arthroscopic Coracohumeral Ligament Release on Range of Motion for Patients with Frozen Shoulder

Hagiwara, Yoshihiro, Sekiguchi, Takuya, Ando, Akira, Kanazawa, Kenji, Koide, Masashi, Hamada, Junichiro, Yabe, Yutaka, Yoshida, Shinichiro, Itoi, Eiji

Journal:

The Open Orthopaedics Journal

Year:

2018

Language:

english

File:

PDF, 229 KB

english, 2018

6

Thermal Properties of Mixed Alkali Bis(trifluoromethylsulfonyl)amides

Hagiwara, Rika, Tamaki, Kenichiro, Kubota, Keigo, Goto, Takuya, Nohira, Toshiyuki

Journal:

Journal of Chemical & Engineering Data

Year:

2008

Language:

english

File:

PDF, 130 KB

english, 2008

7

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Optical Microlithography XIV - Impact of acid/quencher behavior on lithography performance

Fukuda, Hiroshi, Hattori, Keiko T., Hagiwara, Takuya, Progler, Christopher J.

Year:

2001

Language:

english

File:

PDF, 2.29 MB

english, 2001

8

Ternary Phase Diagrams of Alkali Bis(trifluoromethylsulfonyl)amides

Kubota, Keigo, Nohira, Toshiyuki, Goto, Takuya, Hagiwara, Rika

Journal:

Journal of Chemical & Engineering Data

Year:

2008

Language:

english

File:

PDF, 118 KB

english, 2008

9

RAGE-dependent NF-kB inflammation processes in the capsule of frozen shoulders

Yano, Toshihisa, Hagiwara, Yoshihiro, Ando, Akira, Kanazawa, Kenji, Koide, Masashi, Sekiguchi, Takuya, Itaya, Nobuyuki, Onoki, Takahiro, Suzuki, Kazuaki, Tsuchiya, Masahiro, Sogi, Yasuhito, Yabe, Yuta

Journal:

Journal of Shoulder and Elbow Surgery

Year:

2020

File:

PDF, 1.04 MB

2020

10

Characterization of Fluoropolymer Resist for 157-nm Lithography

Hagiwara, Takuya, Irie, Shigeo, Itani, Toshiro, Kawaguchi, Yasuhide, Yokokoji, Osamu, Kodama, Shun-ichi

Journal:

Journal of Photopolymer Science and Technology

Year:

2003

File:

PDF, 1.84 MB

2003

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - Double patterning using dual spin-on Si containing layers with multilayer hard mask process

Terai, Mamoru, Ishibashi, Takeo, Shinohara, Masaaki, Yonekura, Kazumasa, Hagiwara, Takuya, Hanawa, Tetsuro, Kumada, Teruhiko

Year:

2008

Language:

english

File:

PDF, 2.09 MB

english, 2008

12

Association between trunk pain and lower extremity pain among youth soccer players: a cross-sectional study

Sogi, Yasuhito, Hagiwara, Yoshihiro, Yabe, Yutaka, Sekiguchi, Takuya, Momma, Haruki, Tsuchiya, Masahiro, Kuroki, Kaoru, Kanazawa, Kenji, Koide, Masashi, Itaya, Nobuyuki, Yoshida, Shinichiro, Yano, Tos

Journal:

BMC Sports Science, Medicine and Rehabilitation

Year:

2018

Language:

english

File:

PDF, 601 KB

english, 2018

13

[IEEE 2019 International 3D Systems Integration Conference (3DIC) - Sendai, Japan (2019.10.8-2019.10.10)] 2019 International 3D Systems Integration Conference (3DIC) - Triple-Layering Technology for Pixel-Parallel CMOS Image Sensors Developed by Hybrid Bonding of SOI Wafers

Goto, Masahide, De Vos, Joeri, Watabe, Toshihisa, Hagiwara, Kei, Nanba, Masakazu, Iguchi, Yoshinori, Higurashi, Eiji, Honda, Yuki, Saraya, Takuya, Kobayashi, Masaharu, Toshiyoshi, Hiroshi, Hiramotoi,

Year:

2019

File:

PDF, 1.36 MB

2019

14

Oscillatory gamma synchronization binds the primary and secondary somatosensory areas in humans

Koichi Hagiwara, Tsuyoshi Okamoto, Hiroshi Shigeto, Katsuya Ogata, Yuko Somehara, Takuya Matsushita, Jun-ichi Kira, Shozo Tobimatsu

Journal:

Year:

2010

Language:

english

File:

PDF, 1.98 MB

english, 2010

15

(Invited) Pixel-Parallel 3-D Integrated CMOS Image Sensors for Next-Generation Video Systems

Goto, Masahide, Honda, Yuki, Watabe, Toshihisa, Hagiwara, Kei, Nanba, Masakazu, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Journal:

ECS Transactions

Year:

2018

Language:

english

File:

PDF, 211 KB

english, 2018

16

[IEEE 2018 IEEE International Symposium on Circuits and Systems (ISCAS) - Florence, Italy (2018.5.27-2018.5.30)] 2018 IEEE International Symposium on Circuits and Systems (ISCAS) - Quarter Video Graphics Array Full-Digital Image Sensing with Wide Dynamic Range and Linear Output Using Pixel-Wise 3D Integration

Goto, Masahide, Honda, Yuki, Watabe, Toshihisa, Hagiwara, Kei, Nanba, Masakazu, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Year:

2018

Language:

english

File:

PDF, 576 KB

english, 2018

17

Novel Wafer Bevel Treatment for Water Immersion Lithography

Terai, Mamoru, Ishibashi, Takeo, Hagiwara, Takuya, Hanna, Tetsuro, Kumada, Teruhiko, Takebe, Yoko, Yokokoji, Osamu, Fujiwara, Tomoharu, Jiang, Jianhai, Niwa, Takafumi, Wakamizu, Shinya, Kyouda, Hideha

Journal:

Journal of Photopolymer Science and Technology

Year:

2008

Language:

english

File:

PDF, 410 KB

english, 2008

18

157-nm Single-Layer Resists Based on Main-Chain-Fluorinated Polymers

Irie, Shigeo, Ishikawa, Seiichi, Hagiwara, Takuya, Yamazaki, Tamio, Furukawa, Takamitsu, Itani, Toshiro, Kawaguchi, Yasuhide, Kodama, Syun-ichi, Yokokoji, Osamu, Kaneko, Isamu, Takebe, Yoko, Okada, Sh

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 400 KB

english, 2003

19

[IEEE 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2017.5.16-2017.5.18)] 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - 3-Layered Au/SiO2 hybrid bonding with 6-μm-pitch au electrodes for 3D structured image sensors

Honda, Yuki, Goto, Masahide, Watabe, Toshihisa, Hagiwara, Kei, Nanba, Masakazu, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Year:

2017

Language:

english

File:

PDF, 426 KB

english, 2017

20

[IEEE 2018 IEEE 18th International Conference on Bioinformatics and Bioengineering (BIBE) - Taichung, Taiwan (2018.10.29-2018.10.31)] 2018 IEEE 18th International Conference on Bioinformatics and Bioengineering (BIBE) - Using NIRS to Detect Brain oxyHb Changes During Short-Term Memory Tasks

Sasabe, Takuya, Hagiwara, Hiroshi

Year:

2018

Language:

english

File:

PDF, 272 KB

english, 2018

21

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Mechanism of immersion specific defects with high receding-angle topcoat

Terai, Mamoru, Lin, Qinghuang, Kumada, Teruhiko, Ishibashi, Takeo, Hagiwara, Takuya, Hanawa, Tetsuro, Ando, Tomoyuki, Matsunobe, Takeshi, Okada, Kazuyuki, Muraji, Yuichi, Yoshikawa, Kazuhiro, Man, Nao

Year:

2007

Language:

english

File:

PDF, 1.09 MB

english, 2007

22

Restriction in the hip internal rotation of the stride leg is associated with elbow and shoulder pain in elite young baseball players

Sekiguchi, Takuya, Hagiwara, Yoshihiro, Yabe, Yutaka, Tsuchiya, Masahiro, Itaya, Nobuyuki, Yoshida, Shinichiro, Yano, Toshihisa, Sogi, Yasuhito, Suzuki, Kazuaki, Itoi, Eiji

Journal:

Journal of Shoulder and Elbow Surgery

Year:

2019

Language:

english

File:

PDF, 219 KB

english, 2019

23

[IEEE 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) - Rohnert Park, CA, USA (2015.10.5-2015.10.8)] 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) - 128 × 96 Pixel-parallel three-dimensional integrated CMOS image sensors with 16-bit A/D converters: By direct bonding with embedded Au electrodes

Goto, Masahide, Hagiwara, Kei, Honda, Yuki, Nanba, Masakazu, Ohtake, Hiroshi, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Year:

2015

Language:

english

File:

PDF, 1.09 MB

english, 2015

24

Study on Cone-defects during the Pattern Fabrication Process with Silicon Nitride

Hagiwara, Takuya, Saito, Kentaro, Chakihara, Hiraku, Matsuo, Shuji, Inoue, Masao, Muranaka, Seiji, Ota, Yuki, Matsuura, Masazumi

Journal:

Journal of Photopolymer Science and Technology

Year:

2015

Language:

english

File:

PDF, 417 KB

english, 2015

25

Ice Growth Inhibition in Antifreeze Polypeptide Solution by Short-Time Solution Preheating

Nishi, Naoto, Miyamoto, Takuya, Waku, Tomonori, Tanaka, Naoki, Hagiwara, Yoshimichi, He, Xiaoming

Journal:

Year:

2016

Language:

english

File:

PDF, 2.62 MB

english, 2016

26

Joint hemorrhage accelerates cartilage degeneration in a rat immobilized knee model

Sogi, Yasuhito, Yabe, Yutaka, Hagiwara, Yoshihiro, Tsuchiya, Masahiro, Onoda, Yoshito, Sekiguchi, Takuya, Itaya, Nobuyuki, Yoshida, Shinichiro, Yano, Toshihisa, Suzuki, Kazuaki, Onoki, Takahiro, Itoi,

Journal:

BMC Musculoskeletal Disorders

Year:

2020

File:

PDF, 5.67 MB

2020

27

[IEEE 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2014.7.15-2014.7.16)] 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Mechanical grinding of Au/SiO2 hybrid-bonded substrates for 3D integrated image sensors

Hagiwara, Kei, Goto, Masahide, Ohtake, Hiroshi, Iguchi, Yoshinori, Saraya, Takuya, Toshiyoshi, Hiroshi, Higurashi, Eiji, Hiramoto, Toshiro

Year:

2014

Language:

english

File:

PDF, 303 KB

english, 2014

28

Musculoskeletal pain in other body sites is associated with new-onset low back pain: a longitudinal study among survivors of the great East Japan earthquake

Yabe, Yutaka, Hagiwara, Yoshihiro, Sekiguchi, Takuya, Sugawara, Yumi, Tsuchiya, Masahiro, Yoshida, Shinichirou, Sogi, Yasuhito, Yano, Toshihisa, Onoki, Takahiro, Takahashi, Tadahisa, Iwatsu, Jun, Tsuj

Journal:

BMC Musculoskeletal Disorders

Year:

2020

File:

PDF, 702 KB

2020

29

Dissolution Behavior of Lithium Oxide in Molten LiCl−KCl Systems

Kado, Yuya, Goto, Takuya, Hagiwara, Rika

Journal:

Journal of Chemical & Engineering Data

Year:

2008

Language:

english

File:

PDF, 352 KB

english, 2008

30

Optical properties of zinc nitride formed by molten salt electrochemical process

Kazuaki Toyoura, Hiroyuki Tsujimura, Takuya Goto, Kan Hachiya, Rika Hagiwara, Yasuhiko Ito

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 381 KB

english, 2005

31

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Advances in Resist Technology and Processing XXI - Characterization of TFE/norbornene-based fluoropolymer resist for 157-nm lithography

Hagiwara, Takuya, Sturtevant, John L., Furukawa, Takamitsu, Itani, Toshiro, Fujii, Kiyoshi, Ishikawa, Takuji, Koh, Meiten, Kodani, Tetsuhiro, Moriya, Tsukasa, Yamashita, Tsuneo, Araki, Takayuki, Toriu

Year:

2004

Language:

english

File:

PDF, 223 KB

english, 2004

32

Late bedtimes, short sleeping time, and longtime video-game playing are associated with low back pain in school-aged athletes

Yabe, Yutaka, Hagiwara, Yoshihiro, Sekiguchi, Takuya, Momma, Haruki, Tsuchiya, Masahiro, Kuroki, Kaoru, Kanazawa, Kenji, Koide, Masashi, Itaya, Nobuyuki, Itoi, Eiji, Nagatomi, Ryoichi

Journal:

European Spine Journal

Year:

2017

Language:

english

File:

PDF, 454 KB

english, 2017

33

Stability of a boron-doped diamond electrode in molten chloride systems

Kado, Yuya, Goto, Takuya, Hagiwara, Rika

Journal:

Diamond and Related Materials

Year:

2009

Language:

english

File:

PDF, 671 KB

english, 2009

34

Dmpo Spin Trapping in the Presence of Fe Ion

Makino, Keisuke, Hagiwara, Takuya, Imaishi, Hiromasa, Nishi, Masatoshi, Fujii, Satoshi, Ohya, Hiroaki, Murakami, Akira

Journal:

Free Radical Research

Year:

1990

Language:

english

File:

PDF, 386 KB

english, 1990

35

[IEEE 2016 International Conference on Electronics Packaging (ICEP) - Hokkaido, Japan (2016.4.20-2016.4.22)] 2016 International Conference on Electronics Packaging (ICEP) - Three-dimensional integration technology of separate SOI layers for photodetectors and signal processors of CMOS image sensors

Goto, Masahide, Hagiwara, Kei, Honda, Yuki, Nanba, Masakazu, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Year:

2016

Language:

english

File:

PDF, 829 KB

english, 2016

36

Youth baseball players with elbow and shoulder pain have both low back and knee pain: a cross-sectional study

Sekiguchi, Takuya, Hagiwara, Yoshihiro, Momma, Haruki, Tsuchiya, Masahiro, Kuroki, Kaoru, Kanazawa, Kenji, Yabe, Yutaka, Koide, Masashi, Itaya, Nobuyuki, Itoi, Eiji, Nagatomi, Ryoichi

Journal:

Knee Surgery, Sports Traumatology, Arthroscopy

Year:

2016

Language:

english

File:

PDF, 483 KB

english, 2016

37

Uncertainty evaluation of fluorescent nuclear track detectors (FNTDs) for neutron dose measurements

Hashizume, Takuya, Okazaki, Tohru, Sanami, Toshiya, Hagiwara, Masayuki, Monjushiro, Hideaki, Hayashi, Hiroaki, Kobayashi, Ikuo

Journal:

Radiation Measurements

Year:

2017

Language:

english

File:

PDF, 617 KB

english, 2017

38

Neutral Molecular Iron(II) Complexes Showing Tunable Bistability at Above, Below, and Just Room Temperature by a Crystal Engineering Approach: Ligand Mobility into a Three-Dimensional Flexible Supramolecular Network

Hagiwara, Hiroaki, Masuda, Takuya, Ohno, Takuya, Suzuki, Mika, Udagawa, Taro, Murai, Kei-ichiro

Journal:

Crystal Growth & Design

Year:

2017

Language:

english

File:

PDF, 5.06 MB

english, 2017

39

Association between sleep disturbance and new-onset subjective knee pain in Great East Japan Earthquake survivors: A prospective cohort study in the Miyagi prefecture

Hagiwara, Yoshihiro, Sekiguchi, Takuya, Sugawara, Yumi, Yabe, Yutaka, Koide, Masashi, Itaya, Nobuyuki, Yoshida, Shinichiro, Sogi, Yasuhito, Tsuchiya, Masahiro, Tsuji, Ichiro, Itoi, Eiji

Journal:

Journal of Orthopaedic Science

Year:

2017

Language:

english

File:

PDF, 406 KB

english, 2017

40

Parentsâ Own Experience of Verbal Abuse Is Associated with their Acceptance of Abuse towards Children from Youth Sports Coaches

Yabe, Yutaka, Hagiwara, Yoshihiro, Sekiguchi, Takuya, Momma, Haruki, Tsuchiya, Masahiro, Kanazawa, Kenji, Koide, Masashi, Itaya, Nobuyuki, Yoshida, Shinichirou, Sogi, Yasuhito, Yano, Toshihisa, Onoki,

Journal:

The Tohoku Journal of Experimental Medicine

Year:

2019

File:

PDF, 390 KB

2019

41

Structural and optical properties of magnesium nitride formed by a novel electrochemical process

Kazuaki Toyoura, Takuya Goto, Kan Hachiya, Rika Hagiwara

Journal:

Electrochimica Acta

Year:

2005

Language:

english

File:

PDF, 127 KB

english, 2005

42

First total syntheses of bicyclic marine sesquiterpenoids drechslerines A and B

Hisahiro Hagiwara, Masakazu Fukushima, Kimihiko Kinugawa, Takuya Matsui, Takashi Hoshi, Toshio Suzuki

Journal:

Year:

2011

Language:

english

File:

PDF, 469 KB

english, 2011

43

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - 157-nm chromeless phase lithography for 45-nm SRAM gate

Suganaga, Toshifumi, Smith, Bruce W., Watanabe, Kunio, Matsuura, Seiji, Hagiwara, Takuya, Furukawa, Takamitsu, Itani, Toshiro, Fujii, Kiyoshi

Year:

2004

Language:

english

File:

PDF, 672 KB

english, 2004

44

MP97-01 EFFICACY OF A NEOADJUVANT LUTEINIZING HORMONE-RELEASING HORMONE ANTAGONIST PLUS LOW-DOSE ESTRAMUSTINE PHOSPHATE IN HIGH-RISK PROSTATE CANCER

Hagiwara, Kazuhisa, Koie, Takuya, Tobisawa, Yuki, Yoneyama, Tohru, Yamamoto, Hayato, Imai, Atsushi, Hatakeyama, Shingo, Yoneyama, Takahiro, Hashimoto, Yasuhiro, Ohyama, Chikara

Journal:

The Journal of Urology

Year:

2017

Language:

english

File:

PDF, 323 KB

english, 2017

45

Novel inorganic ionic liquids possessing low melting temperatures and wide electrochemical windows: Binary mixtures of alkali bis(fluorosulfonyl)amides

Keigo Kubota, Toshiyuki Nohira, Takuya Goto, Rika Hagiwara

Journal:

Electrochemistry Communications

Year:

2008

Language:

english

File:

PDF, 276 KB

english, 2008

46

A novel MOSFET with vertical signal-transfer capability for 3D-structured CMOS image sensors

Goto, Masahide, Hagiwara, Kei, Iguchi, Yoshinori, Ohtake, Hiroshi, Saraya, Takuya, Toshiyoshi, Hiroshi, Hiramoto, Toshiro

Journal:

IEEJ Transactions on Electrical and Electronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.43 MB

english, 2014

47

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Status of 157 nm lithography and prospects for immersion

Fujii, Kiyoshi, Hagiwara, Takuya, Matsuura, Seiji, Ishimaru, Toshiyuki, Matsubara, Yoshihisa, Wakamiya, Wataru, Smith, Bruce W.

Year:

2005

Language:

english

File:

PDF, 336 KB

english, 2005

48

Influence of living environments and working status on low back pain for survivors of the Great East Japan Earthquake

Hagiwara, Yoshihiro, Yabe, Yutaka, Sugawara, Yumi, Sato, Mari, Watanabe, Takashi, Kanazawa, Kenji, Sonofuchi, Kazuaki, Koide, Masashi, Sekiguchi, Takuya, Tsuchiya, Masahiro, Tsuji, Ichiro, Itoi, Eiji

Journal:

Journal of Orthopaedic Science

Year:

2016

Language:

english

File:

PDF, 224 KB

english, 2016

49

Selective delivery of 5-fluorouracil (5-FU) to i.p. tissues using 5-FU microspheres in rats

Hagiwara, Akeo, Sakakura, Chouhei, Tsujimoto, Hiroyuki, Imanishi, Tsutomu, Ohgaki, Masaharu, Yamasaki, Junya, Sawai, Kiyoshi, Takahashi, Toshio, Fujita, Takuya, Yamamoto, Akira, Muranishi, Shozo, Ikad

Journal:

Anti-Cancer Drugs

Year:

1997

File:

PDF, 395 KB

1997

50

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Optical Microlithography XV - CD control in phase-edge lithography: the effects of lens aberration and pattern layout

Hagiwara, Takuya, Hayano, Katsuya, Moniwa, Akemi, Fukuda, Hiroshi, Yen, Anthony

Year:

2002

Language:

english

File:

PDF, 1.67 MB

english, 2002

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